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ESA500W
EBARA ESA500W Manuals
Manuals and User Guides for EBARA ESA500W. We have
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EBARA ESA500W manual available for free PDF download: Instruction Manual
EBARA ESA500W Instruction Manual (81 pages)
Multi-Stage Dry Vacuum Pump, 200V/400V, 50Hz, 200-220V/400-480V, 60Hz
Brand:
EBARA
| Category:
Water Pump
| Size: 1.3 MB
Table of Contents
Important Prior Warnings
5
Standard Limited Warranty
11
Table of Contents
12
Foreword
14
Introduction
14
Environmental Concerns
15
Product Description
16
Outline
16
Pump Module
16
N2 Gas
16
Cooling Water
17
Exhaust
17
Control System
17
Warning
17
Operation Status Control
18
The Way of Pump Moving
18
Preparation
18
Moving Method
19
Detailed Specifications
20
Installation
24
Movement and Fixation
24
Location
24
Caster and Adjustment Foot
24
Piping
26
Vacuum and Exhaust Piping
26
Cooling Water Piping
27
N2 Gas Piping
29
Ventilation Duct
29
Electrical Wiring
31
Grounding
32
Power Supply Wiring
33
Control Signal Wiring
34
Power Supply for Accessories
37
LCD Controller
38
LCD Outline
38
LCD Indication
39
Setting the Operational Mode
43
Setting the Pump Operation Control Mode
45
Setting the DIP Switch
45
Setting the Pump Running Mode
46
Setting the BP Normal Rotational Speed
46
Setting the Rotational Speed in the LOW SPEED Mode
46
Setting the Pump N2 Flow
47
Setting the WARNING Value for the Back Pressure (Option)
48
Dip Switch
49
Dip Switch Setting Display
53
Starting/Stopping the Pump with the LCD Controller
54
Operation
55
Before Starting
55
Start/Stop
57
LOCAL Start/Stop
58
REMOTE Start/Stop
59
COMMUNICATION Start/Stop
60
Maintenance and Inspection
61
Internal Energies
61
Power Source
61
Cooling Water
61
N2 Gas
61
Routine Inspection
62
Vacuum and Exhaust Piping
64
Lubricant Oil
65
Spare (Maintenance) Parts List
68
List of Wastes During Maintenance
69
Overhaul
70
Disconnection and Transportation
71
Troubleshooting
74
Troubleshooting (1) Basic Trouble
74
Troubleshooting (2) WARNING
76
Troubleshooting (3) ALARM
78
Troubleshooting (4) Option
81
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