LEYBOLD MAG.DRIVE L1 Manuals

Manuals and User Guides for LEYBOLD MAG.DRIVE L1. We have 1 LEYBOLD MAG.DRIVE L1 manual available for free PDF download: Operating Instructions Manual

LEYBOLD MAG.DRIVE L1 Operating Instructions Manual

LEYBOLD MAG.DRIVE L1 Operating Instructions Manual (84 pages)

Turbomolecular Pumps with magnetic bearing

Brand: LEYBOLD | Category: Water Pump | Size: 2.62 MB

Table of Contents

Table of Contents
2
1 Description

3
Contents

6
2 Installation

22
- General Safety Information
  22
- Unpacking - Storing - Transportation
  22
- Operating Environment
  23
- Connecting the MAG to the Vacuum Chamber
  23
- Connecting the Backing Pump
  28
- Connecting the Cooling Water
  28
- Connecting the Purge Gas
  30
- Installing the MAG.DRIVE
  32
- Power Supply Connection X10
  33
- Pump Connection
  33
- Control Plug X1
  36
- Interface Connector
  38
- Connection X33
  39
3 Operation

40
- Switching on
  40
- Operation
  41
- Switching off
  41
4 Converter Control

43
- Functions of the Front Panel Keys
  43
- Operating Display
  43
- Remote Control
  44
- Operating Statuses
  46
- Operating Menu for the MAG.DRIVE L
  48
- Basic Menu
  48
- Settings Converter
  49
- Settings Pump
  50
- Settings Active Magnetic Bearing
  50
- Settings Temperature Management System
  51
- Settings Purge / Vent
  51
- Total View of the Menu
  52
- Operating Menu for the MAG.DRIVE L2
  53
- Basic Menu
  53
- Settings Converter
  54
- Settings Pump
  55
- Settings Temperature Management System
  55
- Settings Purge / Vent
  56
- Total View of the Menu
  57
- Temperature Management System
  58
- TMS for the MAG.DRIVE L
  58
- TMS for the MAG.DRIVE L2
  60
5 Maintenance

62
- Removing the Pump from the System
  62
- Service at Leybold's
  64
Troubleshooting

65
- Troubleshooting for the MAG.DRIVE L
  66
- Warning and Failure Messages
  66
- Failure Messages
  67
- Warning Messages
  68
- Malfunctions
  69
- Troubleshooting for the MAG.DRIVE L2
  70
- Warning Messages
  70
- Failure Messages
  72
- Malfunctions
  77
  - Certifications
    78
  - Forms
    81
- Binding
  82

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