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MAG W 1600 C
LEYBOLD MAG W 1600 C Manuals
Manuals and User Guides for LEYBOLD MAG W 1600 C. We have
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LEYBOLD MAG W 1600 C manual available for free PDF download: Operating Instructions Manual
LEYBOLD MAG W 1600 C Operating Instructions Manual (84 pages)
Turbomolecular Pumps with magnetic bearing
Brand:
LEYBOLD
| Category:
Water Pump
| Size: 2.62 MB
Table of Contents
Table of Contents
2
1 Description
3
System Overview
3
Compatibility with Pumped Media
4
Design of the MAG
4
Contents
6
Function and Design of the MAG.DRIVE
6
Standard Specification
8
Technical Data
9
Ordering Information
10
2 Installation
22
General Safety Information
22
Unpacking - Storing - Transportation
22
Operating Environment
23
Connecting the MAG to the Vacuum Chamber
23
Connecting the Backing Pump
28
Connecting the Cooling Water
28
Connecting the Purge Gas
30
Installing the MAG.DRIVE
32
Power Supply Connection X10
33
Pump Connection
33
Control Plug X1
36
Interface Connector
38
Connection X33
39
3 Operation
40
Switching on
40
Operation
41
Switching off
41
4 Converter Control
43
Functions of the Front Panel Keys
43
Operating Display
43
Remote Control
44
Operating Statuses
46
Operating Menu for the MAG.DRIVE L
48
Basic Menu
48
Settings Converter
49
Settings Pump
50
Settings Active Magnetic Bearing
50
Settings Temperature Management System
51
Settings Purge / Vent
51
Total View of the Menu
52
Operating Menu for the MAG.DRIVE L2
53
Basic Menu
53
Settings Converter
54
Settings Pump
55
Settings Temperature Management System
55
Settings Purge / Vent
56
Total View of the Menu
57
Temperature Management System
58
TMS for the MAG.DRIVE L
58
TMS for the MAG.DRIVE L2
60
5 Maintenance
62
Removing the Pump from the System
62
Service at Leybold's
64
Troubleshooting
65
Troubleshooting for the MAG.DRIVE L
66
Warning and Failure Messages
66
Failure Messages
67
Warning Messages
68
Malfunctions
69
Troubleshooting for the MAG.DRIVE L2
70
Warning Messages
70
Failure Messages
72
Malfunctions
77
Certifications
78
Forms
81
Binding
82
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