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LEYBOLD MAG W 2200 C Manuals
Manuals and User Guides for LEYBOLD MAG W 2200 C. We have
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LEYBOLD MAG W 2200 C manual available for free PDF download: Operating Instructions Manual
LEYBOLD MAG W 2200 C Operating Instructions Manual (112 pages)
Turbomolecular Pumps with Magnetic Bearing, Electronic Frequency Converter
Brand:
LEYBOLD
| Category:
Water Pump
| Size: 4.13 MB
Table of Contents
Operating Instructions
1
Table of Contents
2
General Safety Information
4
1 Description
7
System Overview
7
Compatibility with Pumped Media
9
Design of the MAG
10
Function and Design of the MAG.DRIVE Digital
12
Standard Specification
14
Technical Data
15
Ordering Data
21
Pump Configuration
22
2 Installation
34
Unpacking - Storing - Transportation
44
Operating Environment
44
Connecting the MAG to the Vacuum Chamber
45
Connecting the Backing Pump
48
Connecting the Cooling Water
50
Connecting the Purge Gas
53
Installing the MAG.DRIVE Digital
58
Power Supply Connection X19
59
Pump Connection
59
Control Plug X14
60
Emergency off
60
Interface Connector
62
3 Operation
66
General Operation Rules
66
Temperature Management System
68
Power Control System (PCS)
70
Operation at High Gas Throughput or High Forevacuum Pressure
70
Bakeout
71
Operation with the START and STOP Keys
72
Remote Control
73
Operation with Plug-In Control
75
Operating Statuses
76
Operating Menu
80
Basic Menu
80
Menü System Info
81
Menu Failure Storage
82
Menu Set Converter
83
Menu Set Pump
84
Menu Set TMS
84
Menu Set Purge / Vent
84
Frequency Settings
85
Total View of the Menu
88
4 Maintenance
90
Cleaning
90
Changing the Rotor
90
Changing the Touch-Down Bearings
90
Cleaning the Frequency Converter Internally
91
Removing the Pump from the System
91
Service at Leybold's
92
Disposal
92
5 Troubleshooting
94
Warning Messages
95
Failure Messages
97
Malfunctions
103
EC Manufacturer's Declaration
104
EC Conformance Declaration
105
Operating Instructions for Magdigital-Series
110
Index
111
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