LEYBOLD TURBOVAC 950 i Manuals

Manuals and User Guides for LEYBOLD TURBOVAC 950 i. We have 1 LEYBOLD TURBOVAC 950 i manual available for free PDF download: Operating Instructions Manual

LEYBOLD TURBOVAC 950 i Operating Instructions Manual

LEYBOLD TURBOVAC 950 i Operating Instructions Manual (54 pages)

Turbomolecular Pumps with Integrated Frequency Converter

Brand: LEYBOLD | Category: Water Pump | Size: 3.1 MB

Table of Contents

Table of Contents
2
Important Safety Information

5
1 Description

8
- Design
  9
- Standard Equipment
  9
- Technical Data
  10
- Technical Data for the Integrated Drive Electronics
  11
- Pumping Speed Curves
  12
- Operation Diagrams
  13
- Ordering Data
  16
- Accessories
  16
2 Transport and Storing

19
3 Installation

20
- Conforming Utilization
  20
- Non-Conforming Utilization
  20
- Operating Environment
  21
- Fitting Accessories
  21
- Attach the Pump to the Vacuum Chamber
  22
- Forevacuum Connection
  27
- Connect the Cooling
  28
- Air Cooling
  28
- Water Cooling
  29
- Water Quality
  30
- Connect a Power Failure Venting Valve or a Venting Valve
  32
- Connect Purge Gas
  33
- Connect a Flange Heater
  34
- Electrical Connection
  34
4 Operation

39
- Media Compatibility / Purge Gas
  39
- Interfaces
  39
- Switching on
  41
- Shutting down
  42
- Venting
  43
- Bakeout
  44
- Operation after a Longer Storage Period
  44
- Removing the Pump from the System
  45
5 Maintenance

46
- Cleaning
  46
- Leybold Service
  46
- Bearing Monitoring and Conditioning
  47
6 Troubleshooting

49
7 Waste Disposal

51
- China Rohs Material Content Declaration
  51
- Certificates
  
  52
- EU Declaration of Conformity
  
  53

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