Ulvac G-Tran SPU Manuals

Manuals and User Guides for Ulvac G-Tran SPU. We have 1 Ulvac G-Tran SPU manual available for free PDF download: Instruction Manual

Ulvac G-Tran SPU Instruction Manual

Ulvac G-Tran SPU Instruction Manual (54 pages)

COLD-CATHODE ION GAUGE

Brand: Ulvac | Category: Accessories | Size: 1.64 MB

Table of Contents

Prior to Operation
3
Safety Denotations
3
Safety Precautions
4
Table of Contents
7
Introduction
10
Overview of G-TRAN SERIES
10
Terminology
10
FEATURES of SC1 Ion Gauge
11
Specifications and Components
12
Key Specifications
12
Standard Accessories
13
Options
13
Service Parts
13
Nomenclature and Functions of Components
14
Assembly
14
Front Panel
15
Input/Output Connector
16
Installation
17
Preparations
17
Installing the Sensor Head to the Sensor Unit
17
Installing the Sensor Unit
17
Electrical Connection
18
Cautions in Handling
19
Output Signals
20
Control Operation
20
High Voltage ON/OFF [HV ON/OFF]
20
Setpoint Actuating Signal [SET-1 ON/OFF][SET-2 ON/OFF]
20
Discharge Valid Signal [Discharge OK/NG]
20
Setting of Setpoint
21
Functions
22
Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF]
22
Setpoint
22
Setting of Setpoint
22
Setpoints of Measuring Unit and Display Unit
22
Measurement Value Output
23
Measurement Value Voltage Output Form
23
Measurement Value Outputs in each Condition
24
Maintenance
25
Preparation of Tools and Others
25
Necessary Tools and Others
25
Necessary Equipment
25
Removing the Sensor Unit and Sensor Head
26
Removing Screws
26
Removing the Sensor Head
26
Disassembling the Sensor Head
27
Exploded View of Sensor Head
27
Removing the Internal Electrode
28
Cleaning the Electrode in the Sensor Head
31
Insulation Check of Anode
31
Cleaning the Anode
31
Cleaning Magnetic Poles 1 and 2
32
Cleaning the Spacer
33
Cleaning the Main Body
34
Cleaning the O-Ring and O-Ring Groove
34
Cleaning Parts
34
Reassembling the Sensor Head
35
Reassembly
35
Checking the Anode Position
35
Insulation Check
36
When a Insulation Resistance Tester Is Available at Hand
36
If a Insulation Resistance Tester Is Not Available at Hand
36
Leak Test
38
Installing the Sensor Unit and Sensor Head
39
Maintenance
39
Troubleshooting
40
Warranty
42
Certificate of Contamination
43
China Rohs Declaration
44
Appendix
45
Pressure-Measurement Value Voltage Table (Pa)
45
Pressure-Measurement Value Voltage Table (Torr)
48
Related Drawings
51
Compatible Sensor Heads
51

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