Ulvac SH200-A Manuals

Manuals and User Guides for Ulvac SH200-A. We have 1 Ulvac SH200-A manual available for free PDF download: Instruction Manual

Ulvac SH200-A Instruction Manual (76 pages)

Multi ionization gauge sensor unit

Brand: Ulvac | Category: Measuring Instruments | Size: 2.09 MB

Before Using this Product
2
Safety Symbol Marks
2
Safety Precautions
3
Revision History
5
Table of Contents
6
Dedicated Application
9
Specification
10
Unpacking and Checking Accessories
11
Accessories
11
Items that Need to be Ordered
11
Separately
12
Sh200 Standard Specifications
12
Sh200 Stand - Alone Mode Standard
14
Specifications
14
Standard Specifications
14
Standard Specifications
15
(Sh200+Swu/Spu+Sau) Standard Specifications
16
Handling Precautions
17
Precautions on Operating Environment
17
Precautions on Power Supply
18
Precautions on Installation
18
Precautions on Operation and Handling
19
Operation
19
Name of each Part and Its Function
20
Controller Section Sh200-A/R
20
Panel Section Sh200-A/R
21
I/Oconnector Serial Communication Type
23
Sh200-R
23
Swu/Spu I/O Connector
24
Sau I/Oconnector
25
Power Supply Internal Circuit
26
Each Mode Setting（Common to Sh200
26
A/R
26
Sau Combination Mode Only
27
Status of each Led
27
Power Led Status （ Common for Sh200
27
A/R
27
Swu/Spu Led Status （ Common for Sh200
27
Sau Led Status （ Common for Sh200-A/R
27
Power Led Blinking Status （Sh200-A
27
Control Input Signal
28
Control Input Signal (Sh200-Aonly )
28
Fil On/Off Signal
29
Fil 1/2 Signal
29
Degas On/Off Signal
30
A/R
31
Pressure Conversion Formula
31
Sh200+Swu Measured Value Output
32
Sh200+Spu Measured Value Output
33
Simplified Conversion Table
35
BMR2 Compatibility Output（Mode Setting
36
Pressure Conversion Formula
36
Control Output Signal
37
Ontrol Output Signal
37
Only )
37
Serial Communication Output Signal (Sh200-Ronly )
37
Sensor Error Signal (Sh200-Aonly )
38
SH200 Stand-Alone Mode
38
SWU Combination Mode
38
SPU Combination Mode
38
SAU Combination Mode
38
Setpoint Operation Signal
39
Only )
39
(Sh200-Aonly )
39
Emission Valid Signal
39
Connection Check Signal
39
Differences between Mode Setting (SH200-A Only)
39
Filament Power Monitoring Signal (SH200-A Only)
39
Setpoint Setting (Sh200-A Only)
40
Operating Pressure Range of Setpoint
40
Setpoint On/Off Pressure
41
Setpoint Setting of Sh200-A
41
Filament Power Monitoring Signal
41
Sh200-R
42
Atmospheric Pressure Adjustment of Sh200-A
42
Zero Point Adjustment of Sh200-A
42
Adjustment of Sh200-R
42
Swu Atmospheric Pressure and Zero
43
Point Adjustment
43
Atmospheric Pressure Adjustment of Sh200-A
43
Zero Point Adjustment of Sh200-A
43
Adjustment of Sh200-R
43
How to Use Serial Communication
44
Sh200-R
44
Communication Specifications
44
Settings
44
Connection Diagram
44
Baud Rate Setting
45
Address Setting
45
Standard Data Format
46
Command List
46
When the Command Is Received
46
Normally
46
When the Command Is Not
46
Received Normally
46
Command
47
Reading Measurement Values
47
And Status
47
Writing Status
47
Reading Status
47
Checking Errors
47
SAU/SWU/SPU Atmospheric
47
Pressure Adjustment Command
47
Adjustment Command
48
And Zero Point Adjustment Initialization Command
48
Checking the Value of Filament Power Monitoring of SH200
48
Reading Setpoint1 Value
48
Reading Setpoint2 Value
49
Writing Setpoint1 Value
49
Writing Setpoint2 Value
49
Reading Mode Setting
49
Writing Mode Setting
49
Reading Address Setting
49
Writing Address Setting
50
Speed
50
Confirmation
50
Checksum
51
Status Setting List
52
When Writing Status
52
When Reading Status
53
Ascii Code Table
55
Replacement of Sensor
56
Tool
56
Removing Sensor
56
Installing Sensor
56
Troubleshooting
57
Check
61
Of the Sensor
61
Technical Report
62
Measurement Principle
62
Sensitivity Coefficient
62
Warranty
65
Ec Declaration of Conformity
67
Certificate of Contamination
68
Diagrams
69
Diagram
69
Diagram
70
Writing Communication 22.3. SH200-A/RDIMENSIONS
71
Sensor Dimensions
72
Enabling Checksum 22.5. DISPLAY UNIT CABLE
73
Unit Cable Guc-200P
74
Disable Checksum 22.7. UNIT CABLE GUC-200A
75

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